JPH0450560Y2 - - Google Patents
Info
- Publication number
- JPH0450560Y2 JPH0450560Y2 JP8146185U JP8146185U JPH0450560Y2 JP H0450560 Y2 JPH0450560 Y2 JP H0450560Y2 JP 8146185 U JP8146185 U JP 8146185U JP 8146185 U JP8146185 U JP 8146185U JP H0450560 Y2 JPH0450560 Y2 JP H0450560Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- electron beam
- ray
- sample
- ray gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 6
- 239000003507 refrigerant Substances 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000000441 X-ray spectroscopy Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- X-Ray Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8146185U JPH0450560Y2 (en]) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8146185U JPH0450560Y2 (en]) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61197546U JPS61197546U (en]) | 1986-12-10 |
| JPH0450560Y2 true JPH0450560Y2 (en]) | 1992-11-27 |
Family
ID=30628263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8146185U Expired JPH0450560Y2 (en]) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450560Y2 (en]) |
-
1985
- 1985-05-29 JP JP8146185U patent/JPH0450560Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61197546U (en]) | 1986-12-10 |
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